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App. No. 12/637,889 · Confirmation No. 4137

ILLUMINATION DEVICE OF A MICROLITHOGRAPHIC PROJECTION EXPOSURE APPARATUS, AND MICROLITHOGRAPHIC PROJECTION EXPOSURE METHOD

Inventor: Markus Deguenther
Abandoned -- Failure to Respond to an Office Action View Publication ↗
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2011-03-03 ABN Abandonment 2 View
2010-07-30 NTC.A.NONCPL Notice to the applicant regarding a non-compliant or non-responsive amendment 3 View
2010-07-13 SA.. Supplemental Response or Supplemental Amendment 1 View
2010-07-13 CLM Claims 6 View
2010-07-13 REM Applicant Arguments/Remarks Made in an Amendment 1 View
2010-07-13 N417 Electronic Filing System Acknowledgment Receipt 2 View
2010-07-13 WFEE Fee Worksheet (SB06) 1 View
2010-07-12 A... Amendment/Request for Reconsideration-After Non-Final Rejection 1 View
2010-07-12 SPEC Specification 1 View
2010-07-12 CLM Claims 6 View
2010-07-12 REM Applicant Arguments/Remarks Made in an Amendment 2 View
2010-07-12 N417 Electronic Filing System Acknowledgment Receipt 2 View
2010-06-17 NTC.PUB Notice of Publication 1 View
2010-04-14 CTNF Non-Final Rejection 15 View
2010-04-14 892 List of references cited by examiner 1 View
2010-04-14 FWCLM Index of Claims 1 View
2010-04-14 SRFW Search information including classification, databases and other search related notes 1 View
2010-04-14 SRNT Examiner's search strategy and results 7 View
2010-04-14 1449 List of References cited by applicant and considered by examiner 1 View
2010-02-17 PPH.DECISION Patent Prosecution Highway decision on request/petition to make special 2 View
2010-01-28 APP.FILE.REC Filing Receipt 3 View
2010-01-28 N570 Communication - Re: Power of Attorney (PTOL-308) 1 View
2010-01-21 PPH.DECISION Patent Prosecution Highway decision on request/petition to make special 4 View
2010-01-20 PA.. Power of Attorney 2 View
2010-01-20 N417 Electronic Filing System Acknowledgment Receipt 2 View
2010-01-19 PEFR Applicant Response to Pre-Exam Formalities Notice 1 View
2010-01-19 OATH Oath or Declaration filed 3 View
2010-01-19 WFEE Fee Worksheet (SB06) 2 View
2010-01-19 N417 Electronic Filing System Acknowledgment Receipt 2 View
2010-01-05 APP.FILE.REC Filing Receipt 3 View
2010-01-05 NTC.MISS.PRT Notice to File Missing Parts 2 View
2009-12-17 FRPR Certified Copy of Foreign Priority Application 31 View
2009-12-17 TRAN.LET Transmittal Letter 1 View
2009-12-15 TRNA Transmittal of New Application 2 View
2009-12-15 ADS Application Data Sheet 4 View
2009-12-15 TRAN.LET Transmittal Letter 2 View
2009-12-15 TRAN.LET Transmittal Letter 1 View
2009-12-15 PPH.PET.652 Petition to make Special under Patent Prosecution Highway 29 View
2009-12-15 IDS Information Disclosure Statement (IDS) Form (SB08) 1 View
2009-12-15 FOR Foreign Reference 16 View
2009-12-15 FOR Foreign Reference 62 View
2009-12-15 FOR Foreign Reference 86 View
2009-12-15 FOR Foreign Reference 38 View
2009-12-15 PPH.PET.652 Petition to make Special under Patent Prosecution Highway 3 View
2009-12-15 WFEE Fee Worksheet (SB06) 2 View
2009-12-15 N417 Electronic Filing System Acknowledgment Receipt 4 View
2009-12-15 AF/D Affidavit-submitted prior to Mar 15, 2013 2 View
2009-12-15 SPEC Specification 13 View
2009-12-15 CLM Claims 3 View
2009-12-15 ABST Abstract 1 View
2009-12-15 DRW Drawings-only black and white line drawings 6 View
2009-12-15 FOR Foreign Reference 15 View
2009-12-15 WFEE Fee Worksheet (SB06) 1 View
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Quick Facts
App. No.
12/637,889
Filed
2009-12-15
Pub. No.
US20100149504A1
Art Unit
2882