Patent Assignment
Reel/Frame 023982/0553
Assignment of Assignor's Interest
Recorded: 2010-02-24
Pages: 3
Assignor
BUDACH, MICHAEL
Executed: 2010-02-09
Assignee
NAWOTEC GMBH
CARL-ZEISS-PROMENADE 10, JENA, 07445, GERMANY
Covered Property
(1)
Determining a Repairing Form of a Defect at or Close to an Edge of a Substrate of a Photo Mask
Related Assignments
(2)
Other recorded transfers of the patent in this record — the chain of ownership.