Patent Assignment
Reel/Frame 029399/0372
Merger
Recorded: 2012-12-04
Pages: 18
Assignor
NAWOTEC GMBH
Executed: 2010-04-26
Assignee
CARL ZEISS SMS GMBH
CARL-ZEISS-PROMENADE 10, JENA, 07745, GERMANY
Covered Property
(1)
Determining a Repairing Form of a Defect at or Close to an Edge of a Substrate of a Photo Mask
Related Assignments
(2)
Other recorded transfers of the patent in this record — the chain of ownership.