Assignment of Assignor's Interest

Recorded: 2010-02-26 Pages: 14

Assignors

SOEMERS, HERMAN M.J.R.

Executed: 2005-06-07

DEUREN, FRANCISKUS HENDRIKUS

Executed: 2005-04-29

VISSER, HENDRIK DIRK

Executed: 2005-06-09

BROERS, SANDER C.

Executed: 2005-05-04

Assignee

CARL ZEISS SMT AG

RUDOLF-EBER-STRASSE 2, OBERKOCHEN, 73447, GERMANY

Covered Property (1)

High Positioning Reproducible Low Torque Mirror - Actuator Interface

Application: 12/712,808 →

Publication: US 2010/0149671

Related Assignments (1)

Other recorded transfers of the patent in this record — the chain of ownership.