IP Library Patent Application 12712808
Patent Application
App. No. 12/712,808

HIGH POSITIONING REPRODUCIBLE LOW TORQUE MIRROR - ACTUATOR INTERFACE

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Quick Facts
Patent No.
US None
App. No.
12/712,808
Abstract

The present high positioning reproducible mirror-actuator interface disclosed herein overcomes the deficiencies associated with conventional interface systems and offer a number of advantages that are disclosed herein. Generally, the mirror mounts provide a reliable and robust interface between the mirrors and actuators, that serve to move and position the mirrors, as wells as providing an interface between the mirrors and gravity compensator pins. The mirror mount is characterized as having a body that has an outer peripheral wall that includes a plurality of flexible elements around the perimeter of the body, each having a high stiffness in plane and a high flexibility out of plane. The body is open at the first end to allow flexing of the flexible elements. The flexible elements providing a direct coupling interface between the mirror mount and the mirror. The flexible elements of the mirror mount provides a number of advantages and increases the performance capabilities of the first mechanical interface between the mirror mount and the actuator.

Claims (3)

1 . A mirror mount for providing an interface between a mirror and another component, the mirror mount comprising:

a body having a first end and an opposing second end, the body including a plurality of flexible elements around a perimeter of the body, each having a high stiffness in plane and a high flexibility out of plane, the body being open at the first end to allow flexing of the flexible elements.

2 .- 29 . (canceled)

Assignments (2)
A MODIFYING CONVERSION Recorded Jan 18, 2011
From: CARL ZEISS SMT AG
To: CARL ZEISS SMT GMBH
Reel/Frame 025763/0367 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Feb 26, 2010
From: SOEMERS, HERMAN M.J.R.; DEUREN, FRANCISKUS HENDRIKUS; VISSER, HENDRIK DIRK; BROERS, SANDER C.
To: CARL ZEISS SMT AG
Reel/Frame 023995/0121 →