Patent Assignment
Reel/Frame 024030/0439
Assignment of Assignor's Interest
Recorded: 2010-03-04
Pages: 3
Assignee
SHARP KABUSHIKI KAISHA
22-22, NAGAIKE-CHO, ABENO-KU, OSAKA-SHI, OSAKA, 545-8522, JAPAN
Covered Property
(1)
Plasma Processing Apparatus with an Exhaust Port Above the Substrate