Assignment of Assignor's Interest

Recorded: 2010-03-04 Pages: 2

Assignor

GISCHA, ROLAND

Executed: 2010-03-03

Assignee

CARL ZEISS SMT AG

RUDOLF-EBER-STRASSE 2, OBERKOCHEN, 73447, GERMANY

Covered Property (1)

Projection Exposure Apparatus for Semiconductor Lithography Comprising a Cooling Device

Application: 12/711,993 →

Publication: US 2010/0220302

Related Assignments (1)

Other recorded transfers of the patent in this record — the chain of ownership.