Patent Assignment
Reel/Frame 024049/0425
Assignment of Assignor's Interest
Recorded: 2010-03-09
Pages: 2
Assignors
HATAKEYAMA, JUN
Executed: 2010-03-01
HASEGAWA, KOJI
Executed: 2010-03-01
TACHIBANA, SEIICHIRO
Executed: 2010-03-01
Assignee
SHIN-ETSU CHEMICAL CO., LTD.
6-1, OTEMACHI 2-CHOME, CHIYODA-KU,, TOKYO, JAPAN
Covered Property
(1)
Positive Resist Composition and Patterning Process