Patent Assignment
Reel/Frame 024060/0098
Assignment of Assignor's Interest
Recorded: 2010-03-10
Pages: 3
Assignors
HUANG, YING-JUI
Executed: 2008-10-03
LIN, CHENG-HSUAN
Executed: 2008-10-03
CHANG, FUH-YU
Executed: 2008-10-03
Assignee
INDUSTRIAL TECHNOLOGY RESEARCH INSTITUTE
NO. 195, SEC. 4, CHUNG-HSING ROAD, CHU-TUNG, HSINCHU, TAIWAN
Covered Property
(1)
Inclined Exposure Lithography System
Application:
12/721,183 →
Publication:
US 2010/0165316