Patent Assignment
Reel/Frame 024062/0900
Assignment of Assignor's Interest
Recorded: 2010-03-11
Pages: 3
Assignors
NISHIMURA, EIICHI
Executed: 2010-03-09
KUSHIBIKI, MASATO
Executed: 2010-03-09
YAMASHITA, FUMIKO
Executed: 2010-03-09
Assignee
TOKYO ELECTRON LIMITED
AKASAKA BIZ TOWER, 3-1, AKASAKA 5-CHOME, MINATO-KU, TOKYO, 107-6325, JAPAN
Covered Property
(1)
Substrate Processing Method