Patent Assignment
Reel/Frame 024099/0369
Assignment of Assignor's Interest
Recorded: 2010-03-18
Pages: 5
Assignors
KU, YI SHA
Executed: 2010-03-08
HSU, WEI TE
Executed: 2010-03-08
PANG, HSIU LAN
Executed: 2010-03-10
SHYU, DEH MING
Executed: 2010-03-10
Assignee
INDUSTRIAL TECHNOLOGY RESEARCH INSTITUTE
NO. 195, SEC. 4, CHUNG HSING RD., CHUTUNG, HSINCHU, 31040, TAIWAN
Covered Property
(1)
System and Method for via Structure Measurement
Related Assignments
(1)
Other recorded transfers of the patent in this record — the chain of ownership.