Patent Assignment
Reel/Frame 024122/0129
Assignment of Assignor's Interest
Recorded: 2010-03-23
Pages: 3
Assignor
HANAZAKI, NORITSUGU
Executed: 2010-03-09
Assignee
NIKON CORPORATION
2-3, MARUNOUCHI 3-CHOME, CHIYODA-KU, TOKYO, JAPAN
Covered Property
(1)
Protective Apparatus, Mask, Mask Forming Apparatus, Mask Forming Method, Exposure Apparatus, Device Fabricating Method, and Foreign Matter Detecting Apparatus