Patent Assignment
Reel/Frame 024194/0169
Assignment of Assignor's Interest
Recorded: 2010-04-06
Pages: 4
Assignors
CHEN, FENG
Executed: 2010-04-02
HUMAYUN, RAASHINA
Executed: 2010-04-02
DANEK, MICHAL
Executed: 2010-04-02
CHANDRASHEKAR, AMAND
Executed: 2010-04-05
Assignee
NOVELLUS SYSTEMS, INC.
3970 NORTH FIRST STREET, SAN JOSE, CALIFORNIA, 95134
Covered Property
(1)
Methods for Depositing Ultra Thin Low Resistivity Tungsten Film for Small Critical Dimension Contacts and Interconnects
Related Assignments
(1)
Other recorded transfers of the patent in this record — the chain of ownership.