Patent Assignment
Reel/Frame 024393/0981
Corrective Assignment to Correct the Fourth Inventor's Name from Amand Chandrashekar to Anand Chandrashekar Previously Recorded on Reel 024194 Frame 0169. Assignor(S) Hereby Confirms the Fourth Inventor's Name to Be Anand Chandrashekar.
Recorded: 2010-05-17
Pages: 6
Assignors
CHEN, FENG
Executed: 2010-04-02
HUMAYUN, RAASHINA
Executed: 2010-04-02
DANEK, MICHAL
Executed: 2010-04-02
CHANDRASHEKAR, ANAND
Executed: 2010-04-05
Assignee
NOVELLUS SYSTEMS, INC.
3970 NORTH FIRST STREET, SAN JOSE, CALIFORNIA, 95134
Covered Property
(1)
Methods for Depositing Ultra Thin Low Resistivity Tungsten Film for Small Critical Dimension Contacts and Interconnects
Related Assignments
(1)
Other recorded transfers of the patent in this record — the chain of ownership.