Assignment of Assignor's Interest

Recorded: 2010-04-30 Pages: 2

Assignor

HARADA, KOICHIRO

Executed: 2010-03-10

Assignee

HITACHI KOKUSAI ELECTRIC, INC.

14-1, SOTOKANDA 4-CHOME, CHIYODA-KU, TOKYO, 1018980, JAPAN

Covered Property (1)

Substrate Processing Apparatus and Method of Manufacturing Semiconductor

Application: 12/716,837 →

Publication: US 2010/0227478