Patent Assignment
Reel/Frame 024478/0205
Assignment of Assignor's Interest
Recorded: 2010-06-03
Pages: 4
Assignors
OHSE, TAKESHI
Executed: 2010-05-21
HIMORI, SHINJI
Executed: 2010-05-21
ABE, JUN
Executed: 2010-05-21
YAMADA, NORIKAZU
Executed: 2010-05-21
Assignee
TOKYO ELECTRON LIMITED
AKASAKA BIZ TOWER, 3-1, AKASAKA 5-CHOME, MINATO-KU, TOKYO, 107-6325, JAPAN
Covered Property
(1)
Substrate Processing Apparatus and Substrate Processing Method Using Same