Patent Assignment
Reel/Frame 024522/0583
Assignment of Assignor's Interest
Recorded: 2010-06-11
Pages: 3
Assignors
NODA, TAKAAKI
Executed: 2010-05-14
WANG, JIE
Executed: 2010-05-13
TONARI, KAZUAKI
Executed: 2010-05-25
SUGIYAMA, SATORU
Executed: 2010-05-25
Assignees
HITACHI KOKUSAI ELECTRIC INC.
14-1, SOTOKANDA 4-CHOME, CHIYODA-KU, TOKYO 101-8980, JAPAN
ELPIDA MEMORY, INC.
2-1, YAESU 2-CHOME, CHUO-KU, TOKYO 104-0028, JAPAN
Covered Property
(1)
Manufacturing Method of Semiconductor Device and Substrate Processing Apparatus
Related Assignments
(1)
Other recorded transfers of the patent in this record — the chain of ownership.