Patent Assignment
Reel/Frame 024593/0632
Assignment of Assignor's Interest
Recorded: 2010-06-25
Pages: 4
Assignors
SEAMONS, MARTIN JAY
Executed: 2010-06-08
LEE, KWANGDUK DOUGLAS
Executed: 2010-06-10
CHAN, CHIU
Executed: 2010-06-03
REILLY, PATRICK
Executed: 2010-06-03
RATHI, SUDHA
Executed: 2010-06-03
Assignee
APPLIED MATERIALS, INC.
P.O. BOX 450A, LEGAL AFFAIRS DEPT., SANTA CLARA, CALIFORNIA, 95052
Covered Property
(1)
Planarizing Etch Hardmask to Increase Pattern Density and Aspect Ratio