Patent Assignment
Reel/Frame 024598/0644
Assignment of Assignor's Interest
Recorded: 2010-06-25
Pages: 4
Assignee
HITACHI KOKUSAI ELECTRIC INC.
14-1, SOTOKANDA 4-CHOME,, CHIYODA-KU, TOKYO 101-8980, JAPAN
Covered Property
(1)
Method of Manufacturing a Semiconductor Device and Substrate Processing Apparatus
Related Assignments
(1)
Other recorded transfers of the patent in this record — the chain of ownership.