Patent Assignment
Reel/Frame 024622/0007
Assignment of Assignor's Interest
Recorded: 2010-07-01
Pages: 3
Assignee
TOKYO ELECTRON LIMITED
3-1 AKASAKA 5-CHOME, MINATO-KU,, TOKYO, 107-6325, JAPAN
Covered Property
(1)
Resist Applying and Developing Method, Resist Film Processing Unit, and Resist Applying and Developing Apparatus Comprising the Unit