Patent Assignment
Reel/Frame 024667/0794
Assignment of Assignor's Interest
Recorded: 2010-07-12
Pages: 2
Assignor
FUJISAWA, TADAHITO
Executed: 2010-06-14
Assignee
KABUSHIKI KAISHA TOSHIBA
1-1, SHIBAURA 1-CHOME, MINATO-KU, TOKYO, 105-8001, JAPAN
Covered Property
(1)
Exposure Control Apparatus, Manufacturing Method of Semiconductor Device, and Exposure Apparatus