Patent Assignment
Reel/Frame 024747/0175
Assignment of Assignor's Interest
Recorded: 2010-07-27
Pages: 3
Assignors
LUO, SHIJIAN
Executed: 2010-07-27
ESCORCIA, ORLANDO
Executed: 2010-07-27
WALDFRIED, CARLO
Executed: 2010-07-27
Assignee
AXCELIS TECHNOLOGIES, INC.
108 CHERRY HILL ROAD, BEVERLY, MASSACHUSETTS, 01915
Covered Property
(1)
Plasma Mediated Ashing Processes
Application:
12/844,193 →
Publication:
US 2012/0024314
Related Assignments
(3)
Other recorded transfers of the patent in this record — the chain of ownership.
First Amendment to Security Agreement
May 10, 2011
From: AXCELIS TECHNOLOGIES, INC.
To: SILICON VALLEY BANK
Reel/Frame 026250/0524 →
Assignment of Assignor's Interest
Dec 21, 2012
From: AXCELIS TECHNOLOGIES, INC.
To: LAM RESEARCH CORPORATION
Reel/Frame 029529/0757 →
Termination of Security Agreement
Apr 16, 2013
From: SILICON VALLEY BANK
To: AXCELIS TECHNOLOGIES, INC.
Reel/Frame 030302/0719 →