Patent Assignment
Reel/Frame 024760/0758
Assignment of Assignor's Interest
Recorded: 2010-07-29
Pages: 3
Assignee
TOKYO ELECTRON LIMITED
3-1, AKASAKA 5-CHOME, MINATO-KU, TOKYO, 107-6325, JAPAN
Covered Property
(1)
Batch Processing Method for Forming Structure Including Amorphous Carbon Film