Patent Assignment
Reel/Frame 024763/0455
Assignment of Assignor's Interest
Recorded: 2010-07-29
Pages: 3
Assignors
VAN GREEVENBROEK, HENDRIKUS ROBERTUS MARIE
Executed: 2010-06-11
CSISZAR, SZILARD ISTVAN
Executed: 2010-06-11
Assignee
ASML NETHERLANDS B.V.
DE RUN 6501, VELDHOVEN, NL - 5504 DR, NETHERLANDS
Covered Property
(1)
Lithographic Apparatus and Method for Illumination Uniformity Correction and Uniformity Drift Compensation
Related Assignments
(1)
Other recorded transfers of the patent in this record — the chain of ownership.