Patent Assignment
Reel/Frame 024763/0503
Assignment of Assignor's Interest
Recorded: 2010-07-29
Pages: 9
Assignors
ZIMMERMAN, RICHARD CARL
Executed: 2010-06-17
KOCHERSPERGER, PETER C.
Executed: 2010-06-17
DOWNEY, TODD R.
Executed: 2010-06-17
STONE, ELIZABETH
Executed: 2010-06-17
KUBICK, FREDERICK
Executed: 2010-06-18
VLADIMIRSKY, OLGA
Executed: 2010-05-17
Assignee
ASML HOLDING N.V.
DE RUN 6501, VELDHOVEN, NL - 5504 DR, NETHERLANDS
Covered Property
(1)
Lithographic Apparatus and Method for Illumination Uniformity Correction and Uniformity Drift Compensation
Related Assignments
(1)
Other recorded transfers of the patent in this record — the chain of ownership.