Patent Assignment
Reel/Frame 024834/0937
Assignment of Assignor's Interest
Recorded: 2010-08-13
Pages: 4
Assignor
APPLIED MATERIALS, INC.
Executed: 2010-08-13
Assignee
ADVANCED THERMAL SCIENCES CORPORATION
3355 EAST LA PALMA AVENUE, ANAHEIM, CALIFORNIA, 92806
Covered Properties
(10)
Capacitively Coupled Plasma Reactor Having Very Agile Wafer Temperature Control
Method for Agile Workpiece Temperature Control in a Plasma Reactor Using a Thermal Model
Plasma Reactor with a Multiple Zone Thermal Control Feed Forward Control Apparatus
Plasma Reactor with Wafer Backside Thermal Loop, Two-Phase Internal Pedestal Thermal Loop and a Control Processor Governing Both Loops
Plasma Reactor with Feed Forward Thermal Control System Using a Thermal Model for Accommodating Rf Power Changes or Wafer Temperature Changes
Method of Processing a Workpiece in a Plasma Reactor Using Multiple Zone Feed Forward Thermal Control
Application:
11/409,184 →
Publication:
US 2007/0091540
Capacitively Coupled Plasma Reactor Having a Cooled/Heated Wafer Support with Uniform Temperature Distribution
Method of Processing a Workpiece in a Plasma Reactor Using Feed Forward Thermal Control
Application:
11/409,326 →
Publication:
US 2007/0091541
Method of Cooling a Wafer Support at a Uniform Temperature in a Capacitively Coupled Plasma Reactor
Method of Operating a Capacitively Coupled Plasma Reactor with Dual Temperature Control Loops
Related Assignments
(20)
Other recorded transfers of the patents in this record — the chain of ownership.
Assignment of Assignor's Interest
Apr 21, 2006
From: BUCHBERGER, DOUGLAS A., JR.; BRILLHART, PAUL LUKAS; FOVELL, RICHARD; BURNS, DOUGLAS H.
To: APPLIED MATERIALS, INC.
Reel/Frame 017801/0176 →
Assignment of Assignor's Interest
Apr 21, 2006
From: BRILLHART, PAUL LUKAS; FOVELL, RICHARD; TAVASSOLI, HAMID; BUCHBERGER, JR., DOUGLAS A.
To: APPLIED MATERIALS, INC.
Reel/Frame 017816/0715 →
Assignment of Assignor's Interest
Apr 21, 2006
From: BRILLHART, PAUL LUKAS; FOVELL, RICHARD; TAVASSOLI, HAMID; BUCHBERGER, DOULGAS A., JR.
To: APPLIED MATERIALS, INC.
Reel/Frame 017813/0621 →
Assignment of Assignor's Interest
Apr 21, 2006
From: BUCHBERGER JR., DOULGAS A.; BRILLHART, PAUL LUKAS; FOVELL, RICHARD; TAVASSOLI, HAMID
To: APPLILED MATERIALS, INC.
Reel/Frame 017813/0208 →
Assignment of Assignor's Interest
Apr 21, 2006
From: BUCHBERGER JR., DOUGLAS A.; BRILLHART, PAUL LUKAS; FOVELL, RICHARD; TAVASSOLI, HAMID
To: APPLIED MATERIALS, INC.
Reel/Frame 017812/0968 →
Assignment of Assignor's Interest
Apr 21, 2006
From: BUCHBERGER, JR., DOUGLAS A.; BRILLHART, PAUL LUKAS; FOVELL, RICHARD; TAVASSOLI, HAMID
To: APPLIED MATERIALS, INC.
Reel/Frame 017812/0965 →
Assignment of Assignor's Interest
Apr 21, 2006
From: BRILLHART, PAUL LUKAS; FOVELL, RICHARD; BUCHBERGER JR., DOUGLAS A.; BURNS, DOUGLAS H.
To: APPLIED MATERIALS, INC.
Reel/Frame 017801/0035 →
Assignment of Assignor's Interest
Apr 21, 2006
From: BUCHBERGER JR., DOUGLAS A.; BRILLHART, PAUL LUKAS; FOVELL, RICHARD; TAVASSOLI, HAMID
To: APPLIED MATERIALS, INC.
Reel/Frame 017801/0735 →
Assignment of Assignor's Interest
Apr 24, 2006
From: BRILLHART, PAUL LUKAS; FOVELL, RICHARD; BUCHBERGER, DOUGLAS A., JR.; BURNS, DOUGLAS H.
To: APPLIED MATERIALS, INC.
Reel/Frame 017809/0593 →
Assignment of Assignor's Interest
Jun 18, 2007
From: THOMPSON, DAVID N.
To: AMERINST HOLDINGS LTD.
Reel/Frame 019444/0567 →
Assignment of Assignor's Interest
Jun 18, 2007
From: HARRIS, JEROME A.
To: AMERINST HOLDINGS LTD.
Reel/Frame 019444/0505 →
Corrective Assignment to Correct the Assignee Name Previously Recorded on Reel 024834 Frame 0937. Assignor(S) Hereby Confirms the Advanced Thermal Sciences Corporation.
Aug 17, 2010
From: APPLIED MATERIALS, INC.
To: ADVANCED THERMAL SCIENCES CORPORATION
Reel/Frame 024849/0577 →
Assignment of Assignor's Interest
Oct 23, 2010
From: BRILLHART, PAUL LUKAS; FOVELL, RICHARD; BUCHBERGER, DOUGLAS A., JR.; BURNS, DOUGLAS H.
To: APPLIED MATERIALS, INC.
Reel/Frame 025184/0761 →
Assignment of Assignor's Interest
Apr 11, 2011
From: COWANS, KENNETH; COWANS, WILLIAM; ZUBILLAGA, GLENN; MILLAN, ISAAC
To: ADVANCED THERMAL SCIENCES CORPORATION
Reel/Frame 026151/0544 →
Assignment of Assignor's Interest
Jul 27, 2011
From: COWANS, KENNETH W.; COWANS, WILLIAM W.; ZUBILLAGA, GLENN W.; MILLAN, ISAAC
To: ADVANCED THERMAL SCIENCES CORPORATION
Reel/Frame 026662/0272 →
Assignment of Assignor's Interest
Mar 21, 2012
From: ADVANCED THERMAL SCIENCES CORPORATION
To: BE AEROSPACE, INC.
Reel/Frame 027900/0509 →
Assignment of Assignor's Interest
Apr 13, 2012
From: COWANS, KENNETH; COWANS, WILLIAM; ZUBILLAGA, GLENN; MILLAN, ISSAC
To: ADVANCED THERMAL SCIENCES CORPORATION
Reel/Frame 028042/0640 →
Security Interest
Mar 10, 2015
From: B/E AEROSPACE, INC.
To: JPMORGAN CHASE BANK, N.A.
Reel/Frame 035176/0493 →
Release of Security Interest
Jan 25, 2019
From: JP MORGAN CHASE BANK, N.A
To: B/E AEROSPACE, INC.
Reel/Frame 049209/0619 →
Assignment of Assignor's Interest
Sep 14, 2022
From: B/E AEROSPACE, INC.
To: ADVANCED THERMAL SCIENCES CORPORATION
Reel/Frame 061086/0083 →