Patent Application
Utility
App. No. 11/409,184
· Confirmation No. 2159
METHOD OF PROCESSING A WORKPIECE IN A PLASMA REACTOR USING MULTIPLE ZONE FEED FORWARD THERMAL CONTROL
Abandoned -- Failure to Pay Issue Fee
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Code | Description | Pages | ||
|---|---|---|---|---|---|
| 2010-12-21 | ABN |
Abandonment | 1 | View | |
| 2010-09-07 | NOA |
Notice of Allowance and Fees Due (PTOL-85) | 7 | View | |
| 2010-09-07 | SRNT |
Examiner's search strategy and results | 3 | View | |
| 2010-09-07 | IIFW |
Issue Information including classification, examiner, name, claim, renumbering, etc. | 1 | View | |
| 2010-09-07 | SRFW |
Search information including classification, databases and other search related notes | 1 | View | |
| 2010-09-07 | 1449 |
List of References cited by applicant and considered by examiner | 1 | View | |
| 2010-08-12 | RCEX |
Request for Continued Examination (RCE) | 1 | View | |
| 2010-08-12 | TRAN.LET |
Transmittal Letter | 2 | View | |
| 2010-08-12 | IDS |
Information Disclosure Statement (IDS) Form (SB08) | 1 | View | |
| 2010-08-12 | N417 |
Electronic Filing System Acknowledgment Receipt | 3 | View | |
| 2010-08-12 | WFEE |
Fee Worksheet (SB06) | 1 | View | |
| 2010-06-16 | NOA |
Notice of Allowance and Fees Due (PTOL-85) | 8 | View | |
| 2010-06-16 | SRFW |
Search information including classification, databases and other search related notes | 1 | View | |
| 2010-06-16 | IIFW |
Issue Information including classification, examiner, name, claim, renumbering, etc. | 1 | View | |
| 2010-06-16 | BIB |
Bibliographic Data Sheet | 1 | View | |
| 2010-06-16 | SRNT |
Examiner's search strategy and results | 4 | View | |
| 2010-06-16 | 1449 |
List of References cited by applicant and considered by examiner | 1 | View | |
| 2010-05-27 | TRAN.LET |
Transmittal Letter | 2 | View | |
| 2010-05-27 | IDS |
Information Disclosure Statement (IDS) Form (SB08) | 1 | View | |
| 2010-05-27 | N417 |
Electronic Filing System Acknowledgment Receipt | 2 | View | |
| 2010-05-24 | EXIN |
Examiner Interview Summary Record (PTOL - 413) | 2 | View | |
| 2010-05-21 | TRAN.LET |
Transmittal Letter | 1 | View | |
| 2010-05-21 | N417 |
Electronic Filing System Acknowledgment Receipt | 2 | View | |
| 2010-04-29 | M327 |
Miscellaneous Communication to Applicant - No Action Count | 2 | View | |
| 2010-04-29 | 1449 |
List of References cited by applicant and considered by examiner | 1 | View | |
| 2010-04-23 | RCEX |
Request for Continued Examination (RCE) | 1 | View | |
| 2010-04-23 | TRAN.LET |
Transmittal Letter | 2 | View | |
| 2010-04-23 | IDS |
Information Disclosure Statement (IDS) Form (SB08) | 1 | View | |
| 2010-04-23 | N417 |
Electronic Filing System Acknowledgment Receipt | 3 | View | |
| 2010-04-23 | WFEE |
Fee Worksheet (SB06) | 1 | View | |
| 2010-04-23 | WFEE |
Fee Worksheet (SB06) | 1 | View | |
| 2010-04-23 | WFEE |
Fee Worksheet (SB06) | 1 | View | |
| 2010-03-05 | TRAN.LET |
Transmittal Letter | 1 | View | |
| 2010-03-05 | N417 |
Electronic Filing System Acknowledgment Receipt | 2 | View | |
| 2010-03-01 | M327 |
Miscellaneous Communication to Applicant - No Action Count | 2 | View | |
| 2010-03-01 | SRNT |
Examiner's search strategy and results | 5 | View | |
| 2010-03-01 | 1449 |
List of References cited by applicant and considered by examiner | 1 | View | |
| 2010-02-08 | TRAN.LET |
Transmittal Letter | 1 | View | |
| 2010-02-08 | N417 |
Electronic Filing System Acknowledgment Receipt | 2 | View | |
| 2010-01-25 | NOA |
Notice of Allowance and Fees Due (PTOL-85) | 7 | View | |
| 2010-01-25 | SRNT |
Examiner's search strategy and results | 7 | View | |
| 2010-01-25 | FWCLM |
Index of Claims | 1 | View | |
| 2010-01-25 | IIFW |
Issue Information including classification, examiner, name, claim, renumbering, etc. | 1 | View | |
| 2010-01-25 | SRFW |
Search information including classification, databases and other search related notes | 1 | View | |
| 2010-01-25 | 1449 |
List of References cited by applicant and considered by examiner | 1 | View | |
| 2010-01-18 | TRAN.LET |
Transmittal Letter | 2 | View | |
| 2010-01-18 | IDS |
Information Disclosure Statement (IDS) Form (SB08) | 1 | View | |
| 2010-01-18 | FOR |
Foreign Reference | 30 | View | |
| 2010-01-18 | N417 |
Electronic Filing System Acknowledgment Receipt | 3 | View | |
| 2009-12-22 | RCEX |
Request for Continued Examination (RCE) | 1 | View | |
| 2009-12-22 | TRAN.LET |
Transmittal Letter | 2 | View | |
| 2009-12-22 | IDS |
Information Disclosure Statement (IDS) Form (SB08) | 1 | View | |
| 2009-12-22 | FOR |
Foreign Reference | 43 | View | |
| 2009-12-22 | FOR |
Foreign Reference | 7 | View | |
| 2009-12-22 | FOR |
Foreign Reference | 13 | View | |
| 2009-12-22 | FOR |
Foreign Reference | 20 | View | |
| 2009-12-22 | FOR |
Foreign Reference | 51 | View | |
| 2009-12-22 | FOR |
Foreign Reference | 24 | View | |
| 2009-12-22 | FOR |
Foreign Reference | 7 | View | |
| 2009-12-22 | FOR |
Foreign Reference | 111 | View | |
| 2009-12-22 | FOR |
Foreign Reference | 30 | View | |
| 2009-12-22 | N417 |
Electronic Filing System Acknowledgment Receipt | 4 | View | |
| 2009-12-22 | WFEE |
Fee Worksheet (SB06) | 1 | View | |
| 2009-11-18 | 1449 |
List of References cited by applicant and considered by examiner | 2 | View | |
| 2009-10-13 | NOA |
Notice of Allowance and Fees Due (PTOL-85) | 7 | View | |
| 2009-10-13 | SRFW |
Search information including classification, databases and other search related notes | 1 | View | |
| 2009-10-13 | SRNT |
Examiner's search strategy and results | 4 | View | |
| 2009-10-13 | 1449 |
List of References cited by applicant and considered by examiner | 1 | View | |
| 2009-10-13 | IIFW |
Issue Information including classification, examiner, name, claim, renumbering, etc. | 1 | View | |
| 2009-10-13 | FWCLM |
Index of Claims | 1 | View | |
| 2009-10-13 | 1449 |
List of References cited by applicant and considered by examiner | 1 | View | |
| 2009-10-13 | 1449 |
List of References cited by applicant and considered by examiner | 1 | View | |
| 2009-10-13 | 1449 |
List of References cited by applicant and considered by examiner | 1 | View | |
| 2009-10-09 | LET. |
Miscellaneous Incoming Letter | 1 | View | |
| 2009-10-09 | N417 |
Electronic Filing System Acknowledgment Receipt | 2 | View | |
| 2009-09-24 | LET. |
Miscellaneous Incoming Letter | 1 | View | |
| 2009-09-24 | N417 |
Electronic Filing System Acknowledgment Receipt | 2 | View | |
| 2009-09-17 | TRAN.LET |
Transmittal Letter | 1 | View | |
| 2009-09-17 | N417 |
Electronic Filing System Acknowledgment Receipt | 2 | View | |
| 2009-08-07 | LET. |
Miscellaneous Incoming Letter | 1 | View | |
| 2009-08-07 | N417 |
Electronic Filing System Acknowledgment Receipt | 2 | View | |
| 2009-08-03 | TRAN.LET |
Transmittal Letter | 1 | View | |
| 2009-08-03 | N417 |
Electronic Filing System Acknowledgment Receipt | 2 | View | |
| 2009-08-03 | TRAN.LET |
Transmittal Letter | 2 | View | |
| 2009-08-03 | IDS |
Information Disclosure Statement (IDS) Form (SB08) | 1 | View | |
| 2009-08-03 | WFEE |
Fee Worksheet (SB06) | 1 | View | |
| 2009-07-27 | DISQ |
Terminal Disclaimer review decision | 1 | View | |
| 2009-07-22 | TRAN.LET |
Transmittal Letter | 1 | View | |
| 2009-07-22 | N417 |
Electronic Filing System Acknowledgment Receipt | 2 | View | |
| 2009-07-07 | N417 |
Electronic Filing System Acknowledgment Receipt | 2 | View | |
| 2009-07-07 | IDS |
Information Disclosure Statement (IDS) Form (SB08) | 1 | View | |
| 2009-07-07 | LET. |
Miscellaneous Incoming Letter | 1 | View | |
| 2009-07-07 | TRAN.LET |
Transmittal Letter | 2 | View | |
| 2009-07-03 | N417 |
Electronic Filing System Acknowledgment Receipt | 2 | View | |
| 2009-07-03 | WFEE |
Fee Worksheet (SB06) | 1 | View | |
| 2009-07-03 | A... |
Amendment/Request for Reconsideration-After Non-Final Rejection | 1 | View | |
| 2009-07-03 | SPEC |
Specification | 23 | View | |
| 2009-07-03 | ABST |
Abstract | 1 | View | |
| 2009-07-03 | CLM |
Claims | 6 | View | |
| 2009-07-03 | REM |
Applicant Arguments/Remarks Made in an Amendment | 5 | View | |
| 2009-07-03 | DIST |
Terminal Disclaimer Filed | 1 | View | |
| 2009-07-03 | TRAN.LET |
Transmittal Letter | 1 | View | |
| 2009-07-03 | WFEE |
Fee Worksheet (SB06) | 1 | View | |
| 2009-06-23 | N417 |
Electronic Filing System Acknowledgment Receipt | 2 | View | |
| 2009-06-23 | LET. |
Miscellaneous Incoming Letter | 1 | View | |
| 2009-06-08 | N417 |
Electronic Filing System Acknowledgment Receipt | 2 | View | |
| 2009-06-08 | IDS |
Information Disclosure Statement (IDS) Form (SB08) | 1 | View | |
| 2009-06-08 | TRAN.LET |
Transmittal Letter | 1 | View | |
| 2009-06-08 | TRAN.LET |
Transmittal Letter | 2 | View | |
| 2009-04-29 | N417 |
Electronic Filing System Acknowledgment Receipt | 2 | View | |
| 2009-04-29 | LET. |
Miscellaneous Incoming Letter | 1 | View | |
| 2009-04-20 | TRAN.LET |
Transmittal Letter | 3 | View | |
| 2009-04-15 | IDS |
Information Disclosure Statement (IDS) Form (SB08) | 1 | View | |
| 2009-04-15 | TRAN.LET |
Transmittal Letter | 2 | View | |
| 2009-04-15 | TRAN.LET |
Transmittal Letter | 2 | View | |
| 2009-04-03 | CTNF |
Non-Final Rejection | 9 | View | |
| 2009-04-03 | 1449 |
List of References cited by applicant and considered by examiner | 1 | View | |
| 2009-04-03 | 1449 |
List of References cited by applicant and considered by examiner | 1 | View | |
| 2009-04-03 | 1449 |
List of References cited by applicant and considered by examiner | 1 | View | |
| 2009-04-03 | 1449 |
List of References cited by applicant and considered by examiner | 1 | View | |
| 2009-04-03 | 1449 |
List of References cited by applicant and considered by examiner | 1 | View | |
| 2009-04-03 | SRFW |
Search information including classification, databases and other search related notes | 1 | View | |
| 2009-04-03 | SRNT |
Examiner's search strategy and results | 7 | View | |
| 2009-04-03 | 1449 |
List of References cited by applicant and considered by examiner | 1 | View | |
| 2009-04-03 | SRNT |
Examiner's search strategy and results | 8 | View | |
| 2009-04-03 | BIB |
Bibliographic Data Sheet | 1 | View | |
| 2009-04-03 | FWCLM |
Index of Claims | 1 | View | |
| 2009-04-03 | 1449 |
List of References cited by applicant and considered by examiner | 1 | View | |
| 2009-04-03 | 1449 |
List of References cited by applicant and considered by examiner | 1 | View | |
| 2009-04-03 | 1449 |
List of References cited by applicant and considered by examiner | 1 | View | |
| 2009-04-03 | 1449 |
List of References cited by applicant and considered by examiner | 2 | View | |
| 2009-04-03 | 1449 |
List of References cited by applicant and considered by examiner | 1 | View | |
| 2009-03-23 | TRAN.LET |
Transmittal Letter | 3 | View | |
| 2009-03-23 | IDS |
Information Disclosure Statement (IDS) Form (SB08) | 1 | View | |
| 2009-03-06 | TRAN.LET |
Transmittal Letter | 9 | View | |
| 2009-01-30 | TRAN.LET |
Transmittal Letter | 4 | View | |
| 2009-01-30 | IDS |
Information Disclosure Statement (IDS) Form (SB08) | 1 | View | |
| 2009-01-16 | ELC. |
Response to Election / Restriction Filed | 1 | View | |
| 2009-01-16 | CLM |
Claims | 6 | View | |
| 2009-01-16 | REM |
Applicant Arguments/Remarks Made in an Amendment | 2 | View | |
| 2009-01-16 | XT/ |
Extension of Time | 1 | View | |
| 2009-01-16 | LET. |
Miscellaneous Incoming Letter | 1 | View | |
| 2008-12-04 | TRAN.LET |
Transmittal Letter | 4 | View | |
| 2008-12-04 | IDS |
Information Disclosure Statement (IDS) Form (SB08) | 2 | View | |
| 2008-12-04 | FOR |
Foreign Reference | 5 | View | |
| 2008-11-24 | IDS |
Information Disclosure Statement (IDS) Form (SB08) | 1 | View | |
| 2008-11-24 | TRAN.LET |
Transmittal Letter | 4 | View | |
| 2008-11-12 | CTRS |
Requirement for Restriction/Election | 5 | View | |
| 2008-11-12 | FWCLM |
Index of Claims | 1 | View | |
| 2008-11-10 | TRAN.LET |
Transmittal Letter | 3 | View | |
| 2008-11-10 | IDS |
Information Disclosure Statement (IDS) Form (SB08) | 1 | View | |
| 2008-11-10 | FOR |
Foreign Reference | 31 | View | |
| 2008-10-14 | IDS |
Information Disclosure Statement (IDS) Form (SB08) | 1 | View | |
| 2008-10-14 | TRAN.LET |
Transmittal Letter | 3 | View | |
| 2008-03-31 | IDS |
Information Disclosure Statement (IDS) Form (SB08) | 1 | View | |
| 2008-03-31 | FOR |
Foreign Reference | 13 | View | |
| 2008-03-31 | TRAN.LET |
Transmittal Letter | 3 | View | |
| 2008-02-21 | TRAN.LET |
Transmittal Letter | 3 | View | |
| 2008-02-21 | IDS |
Information Disclosure Statement (IDS) Form (SB08) | 1 | View | |
| 2007-12-10 | TRAN.LET |
Transmittal Letter | 3 | View | |
| 2007-12-10 | IDS |
Information Disclosure Statement (IDS) Form (SB08) | 1 | View | |
| 2007-08-27 | IDS |
Information Disclosure Statement (IDS) Form (SB08) | 4 | View | |
| 2007-08-27 | FOR |
Foreign Reference | 8 | View | |
| 2007-04-26 | NTC.PUB |
Notice of Publication | 1 | View | |
| 2006-05-22 | IDS |
Information Disclosure Statement (IDS) Form (SB08) | 4 | View | |
| 2006-04-21 | TRNA |
Transmittal of New Application | 2 | View | |
| 2006-04-21 | SPEC |
Specification | 72 | View | |
| 2006-04-21 | CLM |
Claims | 6 | View | |
| 2006-04-21 | ABST |
Abstract | 1 | View | |
| 2006-04-21 | DRW |
Drawings-only black and white line drawings | 31 | View | |
| 2006-04-21 | OATH |
Oath or Declaration filed | 4 | View | |
| 2006-04-21 | WFEE |
Fee Worksheet (SB06) | 1 | View | |
| 2006-04-21 | WFEE |
Fee Worksheet (SB06) | 1 | View |
Inventors
Paul Lukas Brillhart
Pleasanton, CA
Richard Fovell
San Jose, CA
Douglas A. Buchberger JR.
Livermore, CA
Douglas H. Burns
Saratoga, CA
Kallol Bera
San Jose, CA
Daniel J. Hoffman
Saratoga, CA
Attorneys & Agents of Record
Classification
USPC
438/795
H10P72/0434
H10P72/0602
H05H2242/26
H10P72/72
H10P72/0421
F25B49/02
F25B2400/0401
F25B2400/0403
F25B2400/0411
F25B2700/21174
F25B2700/21175
H01J37/32091
H01J37/32183
H01J37/32724
H01J2237/2001
Prosecution
- Examiner
- SWANSON, WALTER H
- Art Unit
- 2823
- Docket No.
- 010274 USA 10/ETCH/DRIE/P
- Confirmation No.
- 2159
Publication
- Pub. No.
- US20070091540A1
- Pub. Date
- 2007-04-26
CORRECTIVE ASSIGNMENT TO CORRECT THE ASSIGNEE NAME PREVIOUSLY RECORDED ON REEL 024834 FRAME 0937. ASSIGNOR(S) HEREBY CONFIRMS THE ADVANCED THERMAL SCIENCES CORPORATION.
Recorded 2010-08-17
ASSIGNMENT OF ASSIGNOR'S INTEREST
Recorded 2010-08-13
from
BERA, KALLOL,
BRILLHART, PAUL LUKAS,
BUCHBERGER JR., DOUGLAS A.,
HOFFMAN, DANIEL J.,
FOVELL, RICHARD,
BURNS, DOUGLAS H.
ASSIGNMENT OF ASSIGNOR'S INTEREST
Recorded 2006-04-21
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Quick Facts
- App. No.
- 11/409,184
- Filed
- 2006-04-21
- Pub. No.
- US20070091540A1
- Examiner
- SWANSON, WALTER H
- Art Unit
- 2823
External Links