Patent Application
Provisional
App. No. 60/729,314
· Confirmation No. 8797
Method for agile workpiece temperature control in a plasma reactor using a thermal model
Provisional Application Expired
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⬇ PDF
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Code | Description | Pages | ||
|---|---|---|---|---|---|
| 2006-01-23 | CFILE |
Request for Corrected Filing Receipt | 5 | View | |
| 2005-12-08 | PEFR |
Applicant Response to Pre-Exam Formalities Notice | 3 | View | |
| 2005-12-08 | WFEE |
Fee Worksheet (SB06) | 1 | View | |
| 2005-11-15 | PEFN |
Pre-Exam Formalities Notice | 1 | View | |
| 2005-10-20 | TRNA |
Transmittal of New Application | 2 | View | |
| 2005-10-20 | SPEC |
Specification | 69 | View | |
| 2005-10-20 | CLM |
Claims | 5 | View | |
| 2005-10-20 | ABST |
Abstract | 1 | View | |
| 2005-10-20 | DRW |
Drawings-only black and white line drawings | 31 | View | |
| 2005-10-20 | WFEE |
Fee Worksheet (SB06) | 1 | View |
Inventors
Daniel J. Hoffman
Saratoga, CA
Paul Lukas Brillhart
Pleasanton, CA
Richard Fovell
San Jose, CA
Hamid Frank Tavassoli
Cupertino, CA
Douglas A. Buchberger JR.
Livermore, CA
Douglas H. Burns
Saratoga, CA
Kallol Bera
San Jose, CA
Attorneys & Agents of Record
Prosecution
- Docket No.
- AM- 10274 L02
- Confirmation No.
- 8797
Child
Claims priority from a provisional application
→
App. 11/408,567
· US 8,221,580
Filed 2006-04-21
· Patented Case
Child
Claims priority from a provisional application
→
App. 12/855,674
· US 8,092,639
Filed 2010-08-12
· Patented Case
Child
Claims priority from a provisional application
→
App. 11/408,559
· US 8,012,304
Filed 2006-04-21
· Patented Case
Child
Claims priority from a provisional application
→
App. 11/408,558
· US 8,021,521
Filed 2006-04-21
· Patented Case
Child
Claims priority from a provisional application
→
App. 12/855,670
· US 8,980,044
Filed 2010-08-12
· Patented Case
Child
Claims priority from a provisional application
→
App. 11/409,183
· US 8,608,900
Filed 2006-04-21
· Patented Case
Child
Claims priority from a provisional application
→
App. 11/409,326
Filed 2006-04-21
· Abandoned -- Failure to Pay Issue Fee
Child
Claims priority from a provisional application
→
App. 11/409,184
Filed 2006-04-21
· Abandoned -- Failure to Pay Issue Fee
Child
Claims priority from a provisional application
→
App. 12/953,793
· US 8,546,267
Filed 2010-11-24
· Patented Case
Child
Claims priority from a provisional application
→
App. 12/949,028
· US 8,329,586
Filed 2010-11-18
· Patented Case
No recorded assignments were found for this patent.
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Quick Facts
- App. No.
- 60/729,314
- Filed
- 2005-10-20
External Links