IP Library Patent Application 60729314
Patent Application Provisional
App. No. 60/729,314 · Confirmation No. 8797

Method for agile workpiece temperature control in a plasma reactor using a thermal model

Provisional Application Expired
⬇ PDF
Code Description Pages PDF
2006-01-23 CFILE Request for Corrected Filing Receipt 5 View
2005-12-08 PEFR Applicant Response to Pre-Exam Formalities Notice 3 View
2005-12-08 WFEE Fee Worksheet (SB06) 1 View
2005-11-15 PEFN Pre-Exam Formalities Notice 1 View
2005-10-20 TRNA Transmittal of New Application 2 View
2005-10-20 SPEC Specification 69 View
2005-10-20 CLM Claims 5 View
2005-10-20 ABST Abstract 1 View
2005-10-20 DRW Drawings-only black and white line drawings 31 View
2005-10-20 WFEE Fee Worksheet (SB06) 1 View
Monitor This Case
Get email alerts when status or documents change.
Order Certified Copies
Most orders are placed with the USPTO same day — all within 24 business hours.
Order via The Patent Place →
Pre-filled with this application's details
Quick Facts
App. No.
60/729,314
Filed
2005-10-20