Patent Assignment
Reel/Frame 024858/0251
Assignment of Assignor's Interest
Recorded: 2010-08-19
Pages: 2
Assignors
FU, HSUEH-HUNG
Executed: 2007-02-15
CHANG, CHIH-WEI
Executed: 2007-02-15
CHEN, SHIH-CHANG
Executed: 2007-02-15
CHANG, CHIN-PIAO
Executed: 2007-02-15
Assignee
TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
NO. 8, LI-HSIN RD. 6, SCIENCE-BASED INDUSTRIAL PARK, HSIN-CHU, 300-77, TAIWAN
Covered Property
(1)
System and Method for Film Stress and Curvature Gradient Mapping for Screening Problematic Wafers
Related Assignments
(1)
Other recorded transfers of the patent in this record — the chain of ownership.