Assignment of Assignor's Interest

Recorded: 2010-09-08 Pages: 2

Assignor

DINGER, UDO

Executed: 2010-09-07

Assignee

CARL ZEISS SMT AG

RUDOLF-EBER-STRASSE 2, OBERKOCHEN, 73447, GERMANY

Covered Property (1)

Illumination System for a Microlithography Projection Exposure Apparatus

Application: 12/871,979 →

Publication: US 2011/0001948

Related Assignments (1)

Other recorded transfers of the patent in this record — the chain of ownership.