IP Library Patent Application 12871979
Patent Application Utility
App. No. 12/871,979 · Confirmation No. 2699

ILLUMINATION SYSTEM FOR A MICROLITHOGRAPHY PROJECTION EXPOSURE APPARATUS

Inventor: Udo Dinger
Abandoned -- Failure to Respond to an Office Action View Publication ↗
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Code Description Pages PDF
2013-05-17 ABN Abandonment 2 View
2012-10-25 CTFR Final Rejection 27 View
2012-10-25 892 List of references cited by examiner 1 View
2012-10-25 SRNT Examiner's search strategy and results 4 View
2012-10-25 SRFW Search information including classification, databases and other search related notes 1 View
2012-08-14 A... Amendment/Request for Reconsideration-After Non-Final Rejection 1 View
2012-08-14 CLM Claims 5 View
2012-08-14 REM Applicant Arguments/Remarks Made in an Amendment 2 View
2012-08-14 WFEE Fee Worksheet (SB06) 2 View
2012-08-14 N417 Electronic Filing System Acknowledgment Receipt 2 View
2012-08-14 WFEE Fee Worksheet (SB06) 1 View
2012-07-02 CTNF Non-Final Rejection 16 View
2012-07-02 892 List of references cited by examiner 1 View
2012-07-02 SRFW Search information including classification, databases and other search related notes 1 View
2012-07-02 1449 List of References cited by applicant and considered by examiner 1 View
2012-07-02 BIB Bibliographic Data Sheet 1 View
2012-07-02 1449 List of References cited by applicant and considered by examiner 1 View
2012-07-02 SRNT Examiner's search strategy and results 7 View
2012-06-19 SRNT Examiner's search strategy and results 1 View
2012-06-19 SRNT Examiner's search strategy and results 1 View
2011-01-06 NTC.PUB Notice of Publication 1 View
2010-10-05 IDS Information Disclosure Statement (IDS) Form (SB08) 1 View
2010-10-05 FOR Foreign Reference 14 View
2010-10-05 371P Documents submitted with 371 (National Stage) Applications 11 View
2010-10-05 N417 Electronic Filing System Acknowledgment Receipt 2 View
2010-10-05 TRAN.LET Transmittal Letter 1 View
2010-10-01 APP.FILE.REC Filing Receipt 3 View
2010-09-22 PEFR Applicant Response to Pre-Exam Formalities Notice 1 View
2010-09-22 OATH Oath or Declaration filed 3 View
2010-09-22 DRW Drawings-only black and white line drawings 1 View
2010-09-22 WFEE Fee Worksheet (SB06) 2 View
2010-09-22 N417 Electronic Filing System Acknowledgment Receipt 2 View
2010-09-15 APP.FILE.REC Filing Receipt 3 View
2010-09-15 NTC.MISS.PRT Notice to File Missing Parts 2 View
2010-09-13 FRPR Certified Copy of Foreign Priority Application 34 View
2010-09-13 TRAN.LET Transmittal Letter 1 View
2010-08-31 TRNA Transmittal of New Application 2 View
2010-08-31 TRAN.LET Transmittal Letter 1 View
2010-08-31 IDS Information Disclosure Statement (IDS) Form (SB08) 1 View
2010-08-31 371P Documents submitted with 371 (National Stage) Applications 14 View
2010-08-31 SPEC Specification 17 View
2010-08-31 CLM Claims 4 View
2010-08-31 ABST Abstract 1 View
2010-08-31 DRW Drawings-only black and white line drawings 11 View
2010-08-31 ADS Application Data Sheet 4 View
2010-08-31 WFEE Fee Worksheet (SB06) 2 View
2010-08-31 N417 Electronic Filing System Acknowledgment Receipt 3 View
2010-08-31 WFEE Fee Worksheet (SB06) 1 View
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Quick Facts
App. No.
12/871,979
Filed
2010-08-31
Pub. No.
US20110001948A1
Art Unit
2882