Patent Application
Utility
App. No. 12/871,979
· Confirmation No. 2699
ILLUMINATION SYSTEM FOR A MICROLITHOGRAPHY PROJECTION EXPOSURE APPARATUS
Inventor:
Udo Dinger
Abandoned -- Failure to Respond to an Office Action
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Code | Description | Pages | ||
|---|---|---|---|---|---|
| 2013-05-17 | ABN |
Abandonment | 2 | View | |
| 2012-10-25 | CTFR |
Final Rejection | 27 | View | |
| 2012-10-25 | 892 |
List of references cited by examiner | 1 | View | |
| 2012-10-25 | SRNT |
Examiner's search strategy and results | 4 | View | |
| 2012-10-25 | SRFW |
Search information including classification, databases and other search related notes | 1 | View | |
| 2012-08-14 | A... |
Amendment/Request for Reconsideration-After Non-Final Rejection | 1 | View | |
| 2012-08-14 | CLM |
Claims | 5 | View | |
| 2012-08-14 | REM |
Applicant Arguments/Remarks Made in an Amendment | 2 | View | |
| 2012-08-14 | WFEE |
Fee Worksheet (SB06) | 2 | View | |
| 2012-08-14 | N417 |
Electronic Filing System Acknowledgment Receipt | 2 | View | |
| 2012-08-14 | WFEE |
Fee Worksheet (SB06) | 1 | View | |
| 2012-07-02 | CTNF |
Non-Final Rejection | 16 | View | |
| 2012-07-02 | 892 |
List of references cited by examiner | 1 | View | |
| 2012-07-02 | SRFW |
Search information including classification, databases and other search related notes | 1 | View | |
| 2012-07-02 | 1449 |
List of References cited by applicant and considered by examiner | 1 | View | |
| 2012-07-02 | BIB |
Bibliographic Data Sheet | 1 | View | |
| 2012-07-02 | 1449 |
List of References cited by applicant and considered by examiner | 1 | View | |
| 2012-07-02 | SRNT |
Examiner's search strategy and results | 7 | View | |
| 2012-06-19 | SRNT |
Examiner's search strategy and results | 1 | View | |
| 2012-06-19 | SRNT |
Examiner's search strategy and results | 1 | View | |
| 2011-01-06 | NTC.PUB |
Notice of Publication | 1 | View | |
| 2010-10-05 | IDS |
Information Disclosure Statement (IDS) Form (SB08) | 1 | View | |
| 2010-10-05 | FOR |
Foreign Reference | 14 | View | |
| 2010-10-05 | 371P |
Documents submitted with 371 (National Stage) Applications | 11 | View | |
| 2010-10-05 | N417 |
Electronic Filing System Acknowledgment Receipt | 2 | View | |
| 2010-10-05 | TRAN.LET |
Transmittal Letter | 1 | View | |
| 2010-10-01 | APP.FILE.REC |
Filing Receipt | 3 | View | |
| 2010-09-22 | PEFR |
Applicant Response to Pre-Exam Formalities Notice | 1 | View | |
| 2010-09-22 | OATH |
Oath or Declaration filed | 3 | View | |
| 2010-09-22 | DRW |
Drawings-only black and white line drawings | 1 | View | |
| 2010-09-22 | WFEE |
Fee Worksheet (SB06) | 2 | View | |
| 2010-09-22 | N417 |
Electronic Filing System Acknowledgment Receipt | 2 | View | |
| 2010-09-15 | APP.FILE.REC |
Filing Receipt | 3 | View | |
| 2010-09-15 | NTC.MISS.PRT |
Notice to File Missing Parts | 2 | View | |
| 2010-09-13 | FRPR |
Certified Copy of Foreign Priority Application | 34 | View | |
| 2010-09-13 | TRAN.LET |
Transmittal Letter | 1 | View | |
| 2010-08-31 | TRNA |
Transmittal of New Application | 2 | View | |
| 2010-08-31 | TRAN.LET |
Transmittal Letter | 1 | View | |
| 2010-08-31 | IDS |
Information Disclosure Statement (IDS) Form (SB08) | 1 | View | |
| 2010-08-31 | 371P |
Documents submitted with 371 (National Stage) Applications | 14 | View | |
| 2010-08-31 | SPEC |
Specification | 17 | View | |
| 2010-08-31 | CLM |
Claims | 4 | View | |
| 2010-08-31 | ABST |
Abstract | 1 | View | |
| 2010-08-31 | DRW |
Drawings-only black and white line drawings | 11 | View | |
| 2010-08-31 | ADS |
Application Data Sheet | 4 | View | |
| 2010-08-31 | WFEE |
Fee Worksheet (SB06) | 2 | View | |
| 2010-08-31 | N417 |
Electronic Filing System Acknowledgment Receipt | 3 | View | |
| 2010-08-31 | WFEE |
Fee Worksheet (SB06) | 1 | View |
Inventors
Udo Dinger
Oberkochen, GERMANY
Attorneys & Agents of Record
Classification
USPC
355/67
G03F7/70175
G02B3/0056
G03F7/70108
G21K1/06
G21K2201/064
G21K2201/065
G21K2201/067
Prosecution
- Examiner
- RIDDLE, CHRISTINA A
- Art Unit
- 2882
- Customer No.
- 26161
- Docket No.
- 17979-0206001 / P16683WOU
- Confirmation No.
- 2699
Foreign Priority
102008000788.9
·
2008-03-20
·
GERMANY
Publication
- Pub. No.
- US20110001948A1
- Pub. Date
- 2011-01-06
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Quick Facts
- App. No.
- 12/871,979
- Filed
- 2010-08-31
- Pub. No.
- US20110001948A1
- Examiner
- RIDDLE, CHRISTINA A
- Art Unit
- 2882
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