Patent Assignment
Reel/Frame 024957/0525
Assignment of Assignor's Interest
Recorded: 2010-09-08
Pages: 6
Assignors
CHEN, HUNG CHIH
Executed: 2010-08-13
HSU, SAMUEL CHU-CHIANG
Executed: 2010-08-13
DANDAVATE, GAUTAM SHASHANK
Executed: 2010-08-13
KOOSAU, DENIS M.
Executed: 2010-08-24
Assignee
APPLIED MATERIALS, INC.
P.O. BOX 450A, LEGAL AFFAIRS DEPT., SANTA CLARA, CALIFORNIA, 95052
Covered Property
(1)
Apparatus and Method for Temperature Control During Polishing