Patent Assignment
Reel/Frame 025056/0898
Assignment of Assignor's Interest
Recorded: 2010-09-28
Pages: 3
Assignee
TOKYO ELECTRON LIMITED
AKASAKA BIZ TOWER, 3-1 AKASAKA 5-CHOME, MINATO-KU, TOKYO, 107-6325, JAPAN
Covered Property
(1)
Selective Etch Process for Silicon Nitride