Patent Assignment
Reel/Frame 025146/0050
Assignment of Assignor's Interest
Recorded: 2010-10-15
Pages: 2
Assignors
SAITO, TATSUYUKI
Executed: 2010-08-23
SAKAI, MASANORI
Executed: 2010-08-23
KAGA, YUKINAO
Executed: 2010-08-23
YOKOGAWA, TAKASHI
Executed: 2010-08-23
Assignee
HITACHI KOKUSAI ELECTRIC, INC.
14-1 SOTOKANDA 4-CHOME, CHIYODA-KU, TOKYO, 1018980, JAPAN
Covered Property
(1)
Method of Manufacturing Semiconductor Device, Substrate Processing Apparatus, and Semiconductor Device
Related Assignments
(1)
Other recorded transfers of the patent in this record — the chain of ownership.