Patent Assignment
Reel/Frame 025148/0567
Assignment of Assignor's Interest
Recorded: 2010-10-15
Pages: 3
Assignors
LAW, KAM S.
Executed: 2010-10-14
TOSHIMA, MASATO
Executed: 2010-10-14
BLONIGAN, WENDELL THOMAS
Executed: 2010-10-13
CAN, LINH
Executed: 2010-10-15
LAW, ROBIN K. F.
Executed: 2010-10-14
Assignee
ORBOTECH LT SOLAR, LLC.
17 GREAT OAKS BOULEVARD, SAN JOSE, CALIFORNIA, 95119
Covered Property
(1)
Showerhead Assembly for Plasma Processing Chamber
Related Assignments
(3)
Other recorded transfers of the patent in this record — the chain of ownership.
Assignment of Assignor's Interest
Jun 17, 2022
From: ORBOTECH LT SOLAR, LLC.
To: ORBOTECH LIMITED
Reel/Frame 060233/0555 →
Assignment of Assignor's Interest
Sep 22, 2022
From: ORBOTECH LIMITED
To: ORBOTECH LT SOLAR, LLC.
Reel/Frame 061176/0621 →
Assignment of Assignor's Interest
Oct 3, 2022
From: ORBOTECH LT SOLAR, LLC.
To: KLA CORPORATION
Reel/Frame 061280/0626 →