Patent Assignment
Reel/Frame 060233/0555
Assignment of Assignor's Interest
Recorded: 2022-06-17
Pages: 7
Assignor
ORBOTECH LT SOLAR, LLC.
Executed: 2022-06-13
Assignee
ORBOTECH LIMITED
P.O. BOX 215, YAVNE, 8110101, ISRAEL
Covered Properties
(8)
Substrate Processing Apparatus
Showerhead Assembly for Plasma Processing Chamber
Processing Apparatus and Processing Method
Auto-Sequencing Inline Processing Apparatus
Auto-Sequencing Multi-Directional Inline Processing Apparatus
Broken Wafer Recovery System
Auto-Sequencing Multi-Directional Inline Processing Method
Broken Wafer Recovery System
Related Assignments
(12)
Other recorded transfers of the patents in this record — the chain of ownership.
Assignment of Assignor's Interest
Sep 26, 2006
From: TOSHIMA, MASATO
To: LAW, KAM S., DR.; TOSHIMA, MASATO
Reel/Frame 018300/0695 →
Assignment of Assignor's Interest
Aug 27, 2009
From: TOSHIMA, MASATO, MR.
To: ORBOTECH LT SOLAR, LLC
Reel/Frame 023159/0602 →
Assignment of Assignor's Interest
Aug 27, 2009
From: LAW, KAM S., DR.
To: ORBOTECH LT SOLAR, LLC
Reel/Frame 023159/0577 →
Assignment of Assignor's Interest
Oct 15, 2010
From: LAW, KAM S.; TOSHIMA, MASATO; BLONIGAN, WENDELL THOMAS; CAN, LINH
To: ORBOTECH LT SOLAR, LLC.
Reel/Frame 025148/0567 →
Assignment of Assignor's Interest
Nov 9, 2010
From: TOSHIMA, MASATO; CAN, LINH
To: ORBOTECH LT SOLAR, LLC.
Reel/Frame 025337/0550 →
Assignment of Assignor's Interest
Dec 10, 2010
From: BLONIGAN, WENDELL THOMAS; TOSHIMA, MASATO; LAW, KAM S.; BERKSTRESSER, DAVID ERIC
To: ORBOTECH LT SOLAR, LLC.
Reel/Frame 025492/0451 →
Assignment of Assignor's Interest
Dec 10, 2010
From: BLONIGAN, WENDELL THOMAS; TOSHIMA, MASATO; LAW, KAM S.; BERKSTRESSER, DAVID ERIC
To: ORBOTECH LT SOLAR, LLC.
Reel/Frame 025492/0441 →
Assignment of Assignor's Interest
May 24, 2011
From: STEVENS, CRAIG LYLE; BERKSTRESSER, DAVID ERIC; BLONIGAN, WENDELL THOMAS
To: ORBOTECH LT SOLAR, LLC.
Reel/Frame 026334/0336 →
Assignment of Assignor's Interest
Jul 26, 2013
From: BLONIGAN, WENDELL THOMAS; TOSHIMA, MASATO; LAW, KAM S.; BERKSTRESSER, DAVID ERIC
To: ORBOTECH LT SOLAR, LLC.
Reel/Frame 030887/0797 →
Assignment of Assignor's Interest
Feb 12, 2014
From: STEVENS, CRAIG LYLE; BERKSTRESSER, DAVID ERIC; BLONIGAN, WENDELL THOMAS
To: ORBOTECH LT SOLAR, LLC.
Reel/Frame 032204/0670 →
Assignment of Assignor's Interest
Sep 22, 2022
From: ORBOTECH LIMITED
To: ORBOTECH LT SOLAR, LLC.
Reel/Frame 061176/0621 →
Assignment of Assignor's Interest
Oct 3, 2022
From: ORBOTECH LT SOLAR, LLC.
To: KLA CORPORATION
Reel/Frame 061280/0626 →