Patent Assignment
Reel/Frame 023159/0602
Assignment of Assignor's Interest
Recorded: 2009-08-27
Pages: 7
Assignor
TOSHIMA, MASATO, MR.
Executed: 2009-08-06
Assignee
ORBOTECH LT SOLAR, LLC
17 GREAT OAKS BOULEVARD, SAN JOSE, CALIFORNIA, 95119
Covered Properties
(3)
Chemical vapor deposition apparatus and electrode plate thereof
Application:
11/322,334 →
Publication:
US 2007/0151516
Substrate Processing Apparatus
Shower head and cvd apparatus using the same
Application:
11/826,336 →
Publication:
US 2008/0196666
Related Assignments
(6)
Other recorded transfers of the patents in this record — the chain of ownership.
Assignment of Assignor's Interest
Sep 26, 2006
From: TOSHIMA, MASATO
To: LAW, KAM S., DR.; TOSHIMA, MASATO
Reel/Frame 018300/0695 →
Assignment of Assignor's Interest
Nov 21, 2007
From: TOSHIMA, MASATO
To: TOSHIMA, MASATO; LAW, KAM S.
Reel/Frame 020146/0452 →
Assignment of Assignor's Interest
Aug 27, 2009
From: LAW, KAM S., DR.
To: ORBOTECH LT SOLAR, LLC
Reel/Frame 023159/0577 →
Assignment of Assignor's Interest
Jun 17, 2022
From: ORBOTECH LT SOLAR, LLC.
To: ORBOTECH LIMITED
Reel/Frame 060233/0555 →
Assignment of Assignor's Interest
Sep 22, 2022
From: ORBOTECH LIMITED
To: ORBOTECH LT SOLAR, LLC.
Reel/Frame 061176/0621 →
Assignment of Assignor's Interest
Oct 3, 2022
From: ORBOTECH LT SOLAR, LLC.
To: KLA CORPORATION
Reel/Frame 061280/0626 →