Patent Assignment
Reel/Frame 025230/0052
Assignment of Assignor's Interest
Recorded: 2010-10-26
Pages: 4
Assignors
NANGOY, ROY C.
Executed: 2010-09-27
SINGH, SARAVJEET
Executed: 2010-09-22
FARR, JON C.
Executed: 2010-09-28
PAMARTHY, SHARMA V.
Executed: 2010-09-14
KUMAR, AJAY
Executed: 2010-09-22
Assignee
APPLIED MATERIALS, INC.
P.O. BOX 450A, LEGAL AFFAIRS DEPT., SANTA CLARA, CALIFORNIA, 95052
Covered Property
(1)
Method and Apparatus for High Efficiency Gas Dissociation in Inductive Couple Plasma Reactor