Patent Assignment
Reel/Frame 025332/0966
Assignment of Assignor's Interest
Recorded: 2010-11-08
Pages: 3
Assignor
SASAKI, RYO
Executed: 2010-07-12
Assignee
CANON KABUSHIKI KAISHA
30-2, SHIMOMARUKO 3-CHOME, OHTA-KU, TOKYO, 146-8501, JAPAN
Covered Property
(1)
Measurement Apparatus for Calculation of Substrate Tilt, Exposure Apparatus, and Device Fabrication Method