Patent Assignment
Reel/Frame 025347/0371
Assignment of Assignor's Interest
Recorded: 2010-11-11
Pages: 4
Assignor
HONDA, MASANOBU
Executed: 2010-11-01
Assignee
TOKYO ELECTRON LIMITED
3-1, AKASAKA 5-CHOME,, MINATO-KU,, TOKYO, 107-6325, JAPAN
Covered Property
(1)
Substrate Processing Method