Patent Assignment
Reel/Frame 025392/0521
Assignment of Assignor's Interest
Recorded: 2010-11-22
Pages: 2
Assignor
LUONG, VINH
Executed: 2010-11-22
Assignee
TOKYO ELECTRON LIMITED
AKASAKA BIZ TOWER, 3-1 AKASAKA 5-CHOME, MINATO-KU, TOKYO, 107-6325, JAPAN
Covered Property
(1)
Process for Etching Silicon with Selectivity to Silicon-Germanium