Patent Assignment
Reel/Frame 025392/0789
Assignment of Assignor's Interest
Recorded: 2010-11-22
Pages: 3
Assignee
CARL ZEISS SMT AG
RUDOLF-EBER-STRASSE 2, OBERKOCHEN, 73447, GERMANY
Covered Property
(1)
Projection Objective and Projection Exposure Apparatus with Negative Back Focus of the Entry Pupil
Related Assignments
(2)
Other recorded transfers of the patent in this record — the chain of ownership.