IP Library Assignment 025987/0400
Patent Assignment
Reel/Frame 025987/0400

A Modifying Conversion

Recorded: 2011-03-21 Pages: 7
Assignor
CARL ZEISS SMT AG
Executed: 2010-10-14
Assignee
CARL ZEISS SMT GMBH
RUDOLF-EBER-STRASSE 2, OBERKOCHEN, 73447, GERMANY
Covered Property (1)
Projection Objective and Projection Exposure Apparatus with Negative Back Focus of the Entry Pupil
Patent: 8,094,380 →
Application: 12/949,985 →
Publication: US 2011/0063596
Related Assignments (2)
Other recorded transfers of the patent in this record — the chain of ownership.
Assignment of Assignor's Interest Nov 22, 2010
From: MANN, HANS-JUERGEN; SINGER, WOLFGANG
To: CARL ZEISS SMT AG
Reel/Frame 025392/0789 →
A Modifying Conversion Jan 18, 2011
From: CARL ZEISS SMT AG
To: CARL ZEISS SMT GMBH
Reel/Frame 025763/0367 →