Patent Assignment
Reel/Frame 025987/0400
A Modifying Conversion
Recorded: 2011-03-21
Pages: 7
Assignor
CARL ZEISS SMT AG
Executed: 2010-10-14
Assignee
CARL ZEISS SMT GMBH
RUDOLF-EBER-STRASSE 2, OBERKOCHEN, 73447, GERMANY
Covered Property
(1)
Projection Objective and Projection Exposure Apparatus with Negative Back Focus of the Entry Pupil
Related Assignments
(2)
Other recorded transfers of the patent in this record — the chain of ownership.