Patent Assignment
Reel/Frame 025532/0601
Assignment of Assignor's Interest
Recorded: 2010-12-21
Pages: 4
Assignors
TANAKA, HIROSHI
Executed: 2010-11-05
MINAMI, TERUOMI
Executed: 2010-11-04
KAWABUCHI, YOSUKE
Executed: 2010-11-04
ITO, NORIHIRO
Executed: 2010-11-04
KAMIMURA, FUMIHIRO
Executed: 2010-11-04
YABUTA, TAKASHI
Executed: 2010-11-22
KOSAI, KAZUKI
Executed: 2010-11-24
UNO, TAKASHI
Executed: 2010-11-04
SEKIGUCHI, KENJI
Executed: 2010-11-04
FUJII, YASUSHI
Executed: 2010-11-04
Assignee
TOKYO ELECTRON LIMITED
3-1 AKASAKA 5-CHOME, MINATO-KU,, TOKYO, 107-6325, JAPAN
Covered Property
(1)
Substrate Liquid Processing Apparatus, Substrate Liquid Processing Method, and Storage Medium Having Substrate Liquid Processing Program Stored Therein