Substrate liquid processing apparatus, substrate liquid processing method, and storage medium having substrate liquid processing program stored therein
Provided are a substrate liquid processing apparatus, a substrate liquid processing method, and a computer readable storage medium having a substrate liquid processing program stored therein that can prevent the occurrence of the electrostatic breakdown caused by the discharge of electric charges in a substrate. The substrate liquid processing apparatus processes a circuit-forming surface of the substrate with a chemical liquid. Furthermore, prior to processing the substrate with the chemical liquid, the substrate liquid processing apparatus performs an anti-static process for an surface opposite to the circuit-forming surface of the substrate by an anti-static liquid, thereby emitting the electric charges on the substrate.
1. A substrate liquid processing method comprising:
processing a substrate with a chemical liquid supplied from a first processing liquid supply device toward a circuit-forming surface of the substrate; and
prior to the processing step, ejecting an anti-static liquid from a second processing liquid supply device toward a surface opposite to the circuit-forming surface thereby performing an anti-static process on the surface opposite to the circuit-forming surface prior to the processing step emitting electric charges exist inside of the substrate from the surface opposite to the circuit-forming surface of the substrate.
2. The substrate liquid processing method according to claim 1 , further comprising, prior to the anti-static process, performing a preliminary process in which a deionized water serving as a processing liquid is supplied toward the substrate while rotating the substrate thereby forming a thin film of the deionized water on the surface of the substrate.
3. The substrate liquid processing method according to claim 2 , wherein the conductivity of the deionized water is lower than that of the anti-static liquid.
4. The substrate liquid processing method according to claim 1 , wherein the conductivity of the anti-static liquid is the same as or higher than that of the chemical liquid used for processing the circuit-forming surface of the substrate.
5. The substrate liquid processing method according to claim 4 , wherein the anti-static liquid is the chemical liquid used for processing the circuit-forming surface of the substrate.
6. The substrate liquid processing method according to claim 1 , further comprising ejecting a mist phase of a mixture of a rinse liquid for rising the substrate and a gas from the second processing liquid supply device toward a surface opposite to the circuit-forming surface of the substrate, after the processing step.