Patent Assignment
Reel/Frame 025532/0982
Assignment of Assignor's Interest
Recorded: 2010-12-21
Pages: 4
Assignor
INATOMI, YUICHIRO
Executed: 2010-12-13
Assignee
TOKYO ELECTRON LIMITED
3-1, AKASAKA 5-CHOME, MINATO-KU, TOKYO, 107-6325, JAPAN
Covered Property
(1)
Substrate Processing Method, Storage Medium Storing Program for Executing Substrate Processing Method and Substrate Processing Apparatus