Patent Assignment
Reel/Frame 025538/0640
Assignment of Assignor's Interest
Recorded: 2010-12-27
Pages: 4
Assignors
HEMBACHER, STEFAN
Executed: 2010-11-30
KRAUS, DIETER
Executed: 2010-11-26
EHM, DIRK HEINRICH
Executed: 2010-11-29
SCHMIDT, STEFAN-WOLFGANG
Executed: 2010-12-06
KOEHLER, STEFAN
Executed: 2010-12-03
CZAP, ALMUT
Executed: 2010-11-30
WIESNER, STEFAN
Executed: 2010-12-08
CHUNG, HIN YIU ANTHONY
Executed: 2010-11-24
Assignee
CARL ZEISS SMT GMBH
RUDOLF-EBER-STRASSE 2, OBERKOCHEN, 73447, GERMANY
Covered Property
(1)
Cleaning Module, Euv Lithography Device and Method for the Cleaning Thereof
Related Assignments
(1)
Other recorded transfers of the patent in this record — the chain of ownership.