Patent Assignment
Reel/Frame 025664/0759
Assignment of Assignor's Interest
Recorded: 2011-01-20
Pages: 3
Assignor
TANAKA, KEIICHI
Executed: 2007-05-16
Assignee
NIKON CORPORATION
2-3, MARUNOUCHI 3-CHOME, CHIYODA-KU, TOKYO, 100-8331, JAPAN
Covered Property
(1)
Substrate Carrying Device, Substrate Carrying Method, and Exposure Device