Substrate carrying device, substrate carrying method, and exposure device

1. A substrate carrying device, comprising:

a movable stage having a chuck and being movable in a horizontal direction, said chuck having a sucking surface which faces downward and sucking a substrate on said sucking surface;

a lifting portion having a lifting mechanism which raises and lowers a lifting table which is movable in a movable range of said movable stage and is capable of being positioned below said movable stage;

a fixed blind disposed below said movable stage; and

a thermophoresis plate which is situated below said lifting table, and which is cooled at a predetermined temperature,

wherein said movable stage moves to a position apart from said fixed blind in a horizontal direction and attaches and detaches said substrate above said thermophoresis plate, and said lifting mechanism is situated below said thermophoresis plate.

2. The substrate carrying device as set forth in claim 1 ,

wherein said substrate accommodated in a protection pod having a base member and a cover member which are separable is carried to said lifting table by a carrying arm with said base member in a state that said protection pod is being separated into said base member and said cover member.

3. The substrate carrying device as set forth in claim 1 ,

wherein said lifting portion has a measuring portion which measures a force which acts on said lifting table.

4. The substrate carrying device as set forth in claim 1 , further comprising:

a drop prevention portion which prevents an accidental dropping of said substrate sucked by said chuck.

5. The substrate carrying device as set forth in claim 4 ,

wherein said drop prevention portion has:

a drop prevention member rotatably disposed on said movable stage side;

a substrate holding portion which rotates said drop prevention member to cause said drop prevention member to hold said substrate sucked by said chuck; and

a release portion which rotates said drop prevention member as said lifting table rises to cause said drop prevention member to release said substrate.

6. The substrate carrying device as set forth in claim 5 ,

wherein said movable stage having a coarse moving stage and a fine moving table which is disposed below said coarse moving stage, said fine moving table being movable in upper and lower directions, said chuck being disposed below said fine moving table, and

wherein said substrate holding portion is a holding member which protrudes downward from said coarse moving stage.

7. The substrate carrying device as set forth in claim 5 , further comprising:

a drop prevention member holding portion which holds said drop prevention member at a hold position of said substrate or at a release position of said substrate.

8. The substrate carrying device as set forth in claim 7 ,

wherein said drop prevention member holding portion has a toggle mechanism composed of a hinge and a spring which holds said drop prevention member.

9. The substrate carrying device as set forth in claim 7 ,

wherein said drop prevention member holding portion magnetically holds said drop prevention member.

10. A substrate conveying method, comprising the steps of:

causing a carrying arm to place a substrate onto a lifting table above a thermophoresis plate which is cooled at a predetermined temperature;

causing a movable stage to move above said lifting table;

causing said lifting table to move upward by a lifting mechanism which is situated below said thermophoresis plate so as to cause said substrate to be sucked onto a lower surface of a chuck of said movable stage; and

causing said moveable stage to move in a horizontal direction to a place above a fixed blind.

11. An exposure device having a substrate carrying device as set forth in claim 1 .