Patent Assignment
Reel/Frame 026080/0672
Assignment of Assignor's Interest
Recorded: 2011-04-06
Pages: 4
Assignors
AUTH, NICOLE
Executed: 2011-03-16
SPIES, PETRA
Executed: 2011-03-09
BECKER, RAINER
Executed: 2011-03-11
HOFMANN, THORSTEN
Executed: 2011-03-09
EDINGER, KLAUS
Executed: 2011-04-03
Assignee
CARL ZEISS SMS GMBH
CARL-ZEISS-PROMENADE 10, JENA, 07745, GERMANY
Covered Property
(1)
Method for Electron Beam Induced Deposition of Conductive Material
Related Assignments
(1)
Other recorded transfers of the patent in this record — the chain of ownership.